Vacuum System 6
5977B Series MSD Troubleshooting and Maintenance Manual 161
High Vacuum Pump
Diffusion pump system
The diffusion pump supports a maximum flow rate of 1.5 mL/min into the
MSD. The diffusion pump uses baffling to prevent vapor from migrating into
the analyzer chamber. Foreline pressure is monitored by the foreline gauge.
The AC board controls the diffusion pump heater.
Turbo pump system
The 5977B Series MSD supports a turbo pump. The turbo pump has a screen to
keep debris out of the pumpbut no baffle is necessary. Pump speed is
controlled by the turbo controller; there is no foreline gauge.
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