Parts 9
5977B Series MSD Troubleshooting and Maintenance Manual 251
Consumables and Maintenance Supplies
This section (Tables 32 through 36) lists parts available for cleaning and
maintaining your MSD.
Tab le 32 EI maintenance supplies
Description Part number
Abrasive paper, 30 µm 5061-5896
Alumina powder, 100 g 3937-6201
Cloths, clean (qty 300) 05980-60051
Cloths, cleaning (qty 300) 9310-4828
Cotton swabs (qty 100) 5080-5400
Diffusion pump fluid (2 required) 6040-0809
Foreline pump oil, D545, 0.5 L 6040-0621
,IDP-3 foreline pump replacement tip seal kit IDP3TS
IDP-3 foreline pump 24V Power Supply G3870-60600
Gloves, clean – Large 8650-0030
Gloves, clean – Small 8650-0029
Grease, Apiezon L, high vacuum 6040-0289