Agilent Technologies 5977B Series

Parts 9
5977B Series MSD Troubleshooting and Maintenance Manual 237
Turbo pump and related parts
Tab le 23 Turbo pump MSD vacuum system components (Figure 59)
Description Part number
Turbomolecular pump G3170-80162
Pfeiffer HiPace 300 turbo pump- Rebuilt G3170-89162
Turbo power assembly G3170-60600
Centering ring seal with screen 0905-1613
Figure 59 Turbo pump and related parts
Turbo Pum p
Ion gauge assembly