Agilent Technologies 5977B Series

234 5977B Series MSD Troubleshooting and Maintenance Manual
9 Parts
IDP3 Dry foreline pump and related parts
Tab le 21 IDP3 foreline pump and related parts (Figure 57)
Description Part number
Foreline hose assembly (hose and internal spring) 05971-60119
• Hose Clamp
†
used with 05971-60119
† Hose clamps are interchangeable, but give an optimum fit if they are matched
1400-3241
Dry foreline pump G3870-60600
Replace tip seal set, non-ammonia IDP3TS
Solid tip seal kit, inert G3870-67000
KF10/16 Clamp (foreline inlet), Micro-Ion vacuum gauge 0100-1397
KF16 Hose adapter G1099-20531
Vibration Isolation kit IDP3VIBISOKIT
Exhaust hose G3170-60100
Exhaust adapter G3170-80029
Barbed fitting G3170-80006
Exhaust hose for oil-less pump G3170-60100