Agilent Technologies 5977B Series

164 5977B Series MSD Troubleshooting and Maintenance Manual
6 Vacuum System
Figure 30 Side plate feedthroughs (HES version)
High voltage (HED)
Detector focus
Ion source and heater
Mass Filter (quadrupole)
Signal (detector output)
EM voltage
PE1, PE2, and Ext feedthroughs