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Agilent Technologies 5977B Series

Agilent Technologies 5977B Series
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Vacuum System 6
5977B Series MSD Troubleshooting and Maintenance Manual 173
Figure 35 The diffusion pump
Inlet
Cooling fins
Too cold sensor
Too hot sensor
Diffusion pump outlet
Cold fluid level marker
Diffusion pump
heater cable
Hot fluid level marker
Fluid level window

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