Azbil MagneW Neo PLUS - Page 326

Maintenance and troubleshooting Azbil Corporation
8-14 Model MTG11A/18A, MTG11B/18B, MTG14C
Table 8-4 Wafer type grounding ring assembly
Grounding ring
material
Diameter
(mm)
Parts number Qty. Parts number Qty.
SUS316 2.5/5 80380639-00100 1 HS314203-05000 1
10 80380639-00200 1 HS314203-05000 1
15 80380639-00300 1 HS314203-05000 1
25 80380640-00100 1 HS314203-05000 1
40 80380641-00100 1 HS311230-06000 1
50 80380641-00200 1 HS311230-06000 1
65 80380641-00300 1 HS311230-06000 1
80 80380641-00400 1 HS311240-06000 1
100 80380641-00500 1 HS311240-06000 1
150 80380641-00700 1 HS311240-06000 1
200 80380641-00800 1 HS311240-06000 1
ASTM B575
(Hastelloy C-
276 equivalent)
2.5/5 80380614-00100 1 HS314203-05000 1
10 80380615-00100 1 HS314203-05000 1
15 80380616-00100 1 HS314203-05000 1
25 80380617-00100 1 HS314203-05000 1
40 80380618-00100 1 HS311230-06000 1
50 80380619-00100 1 HS311230-06000 1
65 80380620-00100 1 HS311230-06000 1
80 80380621-00100 1 HS311240-06000 1
100 80380622-00100 1 HS311240-06000 1
150 80380624-00100 1 HS311240-06000 1
200 80380625-00100 1 HS311240-06000 1
Titanium 2.5/5 80380614-00200 1 HS314203-05000 1
10 80380615-00200 1 HS314203-05000 1
15 80380616-00200 1 HS314203-05000 1
25 80380617-00200 1 HS314203-05000 1
40 80380618-00200 1 HS311230-06000 1
50 80380619-00200 1 HS311230-06000 1
65 80380620-00200 1 HS311230-06000 1
80 80380621-00200 1 HS311240-06000 1
100 80380622-00200 1 HS311240-06000 1
150 80380624-00200 1 HS311240-06000 1
200 80380625-00200 1 HS311240-06000 1
Zirconium 2.5/5 80380614-00700 1 HS314203-05000 1
10 80380615-00700 1 HS314203-05000 1
15 80380616-00700 1 HS314203-05000 1
25 80380617-00700 1 HS314203-05000 1
40 80386018-00700 1 HS311230-06000 1
50 80380619-00700 1 HS311230-06000 1
65 80380620-00700 1 HS311230-06000 1
80 80380621-00700 1 HS311240-06000 1
100 80380622-00700 1 HS311240-06000 1
150 80380624-00700 1 HS311240-06000 1
200 80380625-00700 1 HS311240-06000 1
CM2-MTG300-2001.book 14 ページ ２０１５年９月２９日 火曜日 午前１０時１４分