Azbil Corporation Maintenance and troubleshooting
Model MTG11A/18A, MTG11B/18B, MTG14C 8-15
Tantalum 2.5/5 80380614-00300 1 HS314203-05000 1
10 80380615-00300 1 HS314203-05000 1
15 80380616-00300 1 HS314203-05000 1
25 80380617-00300 1 HS314203-05000 1
40 80380618-00300 1 HS311230-06000 1
50 80380619-00300 1 HS311230-06000 1
65 80380620-00300 1 HS311230-06000 1
80 80380621-00300 1 HS311240-06000 1
100 80380622-00300 1 HS311240-06000 1
150 80380624-00300 1 HS311240-06000 1
200 80380625-00300 1 HS311240-06000 1
Platinum 2.5/5 80380614-00400 1 HS314203-05000 1
10 80380615-00400 1 HS314203-05000 1
15 80380616-00400 1 HS314203-05000 1
25 80380617-00400 1 HS314203-05000 1
40 80380618-00400 1 HS311230-06000 1
50 80380619-00400 1 HS311230-06000 1
65 80380620-00400 1 HS311230-06000 1
80 80380621-00400 1 HS311240-06000 1
100 80380622-00400 1 HS311240-06000 1
150 80380624-00400 1 HS311240-06000 1
200 80380625-00400 1 HS311240-06000 1
Gasket
Diameter 
(mm)
Parts number Qty.
PTFE 2.5/5 80380613-00100 1
10 80380613-00200 1
15 80380613-00300 1
25 80380613-00400 1
40 80380613-00500 1
50 80380613-00600 1
65 80380613-00700 1
80 80380613-00800 1
100 80380613-00900 1
150 80380613-01100 1
200 80380613-01200 1
Table 8-4   Wafer type grounding ring assembly
Grounding ring 
material
Diameter 
(mm)
Parts number Qty. Parts number Qty.
CM2-MTG300-2001.book  15 ページ  2015年9月29日 火曜日 午前10時14分