Parameter
nEXT400D
ISO160
nEXT400D
CF160
nEXT400T
ISO160
nEXT400T
CF160
Peak booster
Pumping speed (nitrog
en)
RV12 backing pump
XDS10 backing pump
- -
26 m
3
h
-1
24 m
3
h
-1
26 m
3
h
-1
24 m
3
h
-1
Ulmate pressure*
<1 x 10
-8
mbar <1 x 10
-10
mbar <1 x 10
-8
mbar <1 x 10
-10
mbar
* Con
tact the supplier to discuss your specic sys
tem details and the achievement of
ulmate pressure.
Note:
Pumping speeds given are without an inlet screen.
Table 5
nEXT pumps technical data
Parameter nEXT240D nEXT240T nEXT300D nEXT300T nEXT400D nEXT400T
Crical backing pressure N
2
9.5 mbar 20 mbar 9.5 mbar 20 mbar 10 mbar 20 mbar
Crical backing pr
essur
e He 7 mbar 8.5 mbar 7.5 mbar 8.5 mbar 8.5 mbar 8.5 mbar
Crical backing pressure H
2
2.5 mbar 3 mbar 2.9 mbar 3 mbar 3 mbar 3 mbar
Maximum c
onnuous inle
t ow (at ulmate backing pressure)*
Nitrogen:
Water cooling (40 °C Ambient)† 45 sccm 55 sccm 95 sccm 65 sccm 105 sccm 50 sccm
Force air cooling (35 °C Ambi-
ent)
30 sccm 50 sccm 115 sccm 100 sccm 90 sccm 105 sccm
Natural convecon (30 °C Ambi-
ent)
10 sccm 10 sccm 35 sccm 25 sccm 45 sccm 25 sccm
Argon:
Water cooling (40 °C Ambient) 35 sccm 35 sccm 63 sccm 42 sccm 70 sccm 49 sccm
Force air cooling (35 °C Ambi-
ent)
20 sccm 28 sccm 76 sccm 70 sccm 70 sccm 77 sccm
Natural convecon (30 °C Ambi-
ent)
7 sccm 7 sccm 20 sccm 20 sccm 28 sccm 20 sccm
Maximum connuous backing pr
essure (at ulmate inlet pressure)*
Nitrogen:
Water cooling (40 °C Ambient)† 6 mbar 2.75 mbar 6.75 mbar 4.75 mbar 7.5 mbar 4 mbar
Force air cooling (35 °C Ambi-
ent)
4.75 mbar 2.75 mbar 7 mbar 8 mbar 7.5 mbar 9 mbar
Natural convecon (30 °C Ambi-
ent)
1 mbar 0.4 mbar 2.75 mbar 1 mbar 4 mbar 1.25 mbar
Argon:
Water cooling (40 °C Ambient) 4.75 mbar 2.75 mbar 6 mbar 3.75 mbar 6.5 mbar 4 mbar
Force air cooling (35 °C Ambi-
ent)
3 mbar 1.5 mbar 6.5 mbar 7 mbar 6.5 mbar 8 mbar
04/2022 - ©Edwards Limited
Page 21B80000880_G
B80000880_G - Technical data
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