Edwards nEXT730 - Page 5

Page 4
4.7 Water cooling .................................................................................................. 35
4.8 Electrical data .................................................................................................. 40
4.9 Logic interface connector ............................................................................... 41
4.10 Serial protocol ............................................................................................... 43
4.11 Command set ................................................................................................ 45
4.12 Multi-drop operation .................................................................................... 52
4.13 Motor controller auxiliary connector socket ................................................ 53
4.14 Indicator LEDs ............................................................................................... 54
5.
Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
56
5.1 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
56
5.2 Connect to the vacuum system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
57
5.2.1 Remove and replace the inlet screen. . . . . . . . . . . . . . . . . . . . . . . . .
58
5.2.2 Mounting orientation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
59
5.2.3 Mount the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
60
5.2.4 Backing port connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
68
5.3 Purge gas connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
69
5.3.1 Recommended purge gas flow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
69
5.3.2 Connect the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
69
5.4 Electrical installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
69
5.4.1 Earth (ground) connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
70
5.4.2 TIC or TAG logic interface connections. . . . . . . . . . . . . . . . . . . . . . . .
70
5.4.3 Connect the logic interface to control equipment. . . . . . . . . . . . . . .
70
5.4.4 Connect the electrical supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
71
5.5 Connect the parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . .
72
5.6 Connection for serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . .
73
5.6.1 Connect the serial interface to the customer control equipment. .
74
5.6.2 Serial enable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
75
5.7 Connection for mixed parallel and serial operation. . . . . . . . . . . . . . . . . . . .
76
5.8 Cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
77
5.8.1 Cooling requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
77
5.8.2 Forced air cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
78
5.8.3 Water cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
78
6. Configuration ......................................................................................... 80
6.1 Configure the pump using serial commands .................................................. 80
6.1.1 Message structure .............................................................................. 81
6.1.2 Command and reply table definitions ................................................ 81
6.1.3 Power limit setting ............................................................................. 82
6.1.4 Powering a fan from the motor controller......................................... 83
6.1.5 Controlled venting options ................................................................ 83
6.1.6 Standby speed setting ........................................................................ 84
6.1.7 Normal speed setting ......................................................................... 84
6.1.8 Timer setting and options .................................................................. 85