B8J200880_E - Installation
All inlet flange bolts must be re-tightened once the system is under vacuum. Ensure that
no torques or other forces are transmitted to the pump from the vacuum system or the
associated pipelines.
Mounting high vacuum ISO-F flange
connection
▪ with clearance hole, refer to Figure:
Mounting high vacuum ISO-F flange
connection with clearance hole
▪ with blind hole thread, refer to
Figure: Mounting high vacuum ISO-F
flange connection with blind hole
thread
Mounting high vacuum flange ISO-K flange
at ISO-F flange with collar flange, refer to
Figure: Mounting high vacuum flange ISO-
K flange at ISO-F flange with collar flange
Mounting high vacuum flange ISO-K flange
at ISO-K flange, refer to Figure: Mounting
high vacuum flange ISO-K flange at ISO-K
flange
Mounting high vacuum flange ISO-K flange
at ISO-F flange with claws, refer to Figure:
Mounting high vacuum flange ISO-K
flange at ISO-F flange with claws
Mounting high vacuum CF flange
connection
▪ with clearance hole, refer to Figure:
Mounting high vacuum CF flange
connection with clearance hole
▪ with blind hole thread, refer to
Figure: Mounting high vacuum CF
flange connection with blind hole
thread
* Mounting of the nEXT1230 with claws is not allowed.