Edwards nEXT730 - Page 8

Page 7
List of Figures
Figure 1: nEXT Model overview....................................................................................................15
Figure 2: Pumping speed curves for nEXT730H ...........................................................................29
Figure 3: Pumping speed curves for nEXT730Q/730D .................................................................29
Figure 4: Pumping speed curves for nEXT930Q/930D .................................................................30
Figure 5: Pumping speed curves for nEXT1230H .........................................................................30
Figure 6: Dimensional drawing for nEXT730/930 .........................................................................31
Figure 7: Dimensional drawing for nEXT1230H ............................................................................32
Figure 8: Maximum allowed rate of pressure rise during venting: pressure against time ........... 34
Figure 9: Maximum relative humidity to avoid condensation with water cooling ....................... 36
Figure 10: Cooling requirements for nitrogen for nEXT730H .......................................................37
Figure 11: Cooling requirements for argon for nEXT730H ...........................................................37
Figure 12: Cooling requirements for nitrogen for nEXT730Q/930Q ............................................38
Figure 13: Cooling requirements for argon for nEXT730Q/930Q.................................................38
Figure 14: Cooling requirements for nitrogen for nEXT730D/930D .............................................39
Figure 15: Cooling requirements for argon for nEXT730D/930D .................................................39
Figure 16: Cooling requirements for nitrogen for nEXT1230H .....................................................40
Figure 17: Cooling requirements for argon for nEXT1230H .........................................................40
Figure 18: Interface circuits for nEXT turbo pump controllers .....................................................43
Figure 19: Conceptual diagram for multi-drop connection using RS232 interface ...................... 52
Figure 20: RS485 multi-drop connection ...................................................................................... 53
Figure 21: Valve connector .......................................................................................................... 54
Figure 22: Typical pumping system with a nEXT pump ................................................................57
Figure 23: Connections and controls ............................................................................................58
Figure 24: Mounting orientation for nEXT1230H .........................................................................59
Figure 25: Mounting orientation for nEXT1230H INV. .................................................................59
Figure 26: Mounting high vacuum ISO-F flange connection with clearance hole ........................ 62
Figure 27: Mounting high vacuum ISO-F flange connection with blind hole thread .................... 63
Figure 28: Mounting high vacuum flange ISO-K flange at ISO-F flange with collar flange ........... 64
Figure 29: Mounting high vacuum flange ISO-K flange at ISO-K flange ........................................ 65
Figure 30: Mounting high vacuum flange ISO-K flange at ISO-F flange with claws ...................... 66
Figure 31: Mounting high vacuum CF flange connection with clearance hole ............................. 67
Figure 32: Mounting high vacuum CF flange connection with blind hole thread ........................ 68
Figure 33: Controller view ........................................................................................................... 70
Figure 34: Power supply connector ..............................................................................................72
Figure 35: Logic interface connections - parallel control .............................................................73
Figure 36: Simplified logic interface connections - parallel control ............................................. 73
Figure 37: Logic interface connections - RS232 serial control ......................................................75
Figure 38: Logic interface connections - RS485 serial control ......................................................75
Figure 39: Logic interface connection - mixed parallel and serial operation................................ 77