STP-iX455/iXL455 Series Instruction Manual
TABLE OF CONTENTS
SAFETY PRECAUTION
INTRODUCTION
PRECAUTIONS
REQUEST
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump ............................................. 1-1
1.1 Usable Gases ...................................................................................................................... 1-1
1.2 Maintenance and Inspection Precautions ........................................................................... 1-1
1.3 Labels .................................................................................................................................. 1-2
2 Operation Principle of the STP Pump ................................................................ 2-1
3 Unpacking ......................................................................................................... 3-1
3.1 Unpacking the STP Pump ................................................................................................... 3-1
3.2 Accessories ......................................................................................................................... 3-1
4 Installation of the STP Pump ............................................................................. 4-1
4.1 Name and Function of Each Part ........................................................................................ 4-1
4.1.1 Name and Function of the Pump ........................................................................... 4-1
4.1.2 Name and Function of the Control Unit .................................................................. 4-3
4.2 Precautions Before Installation ........................................................................................... 4-6
4.2.1 Operating Environment .......................................................................................... 4-6
4.2.2 Installation Area ..................................................................................................... 4-8
4.2.3 Bench ..................................................................................................................... 4-8
4.3 How to Install the STP Pump .............................................................................................. 4-9
4.3.1 Cleaning the Seal ................................................................................................. 4-10
4.3.2 STP Pump Installation Positions .......................................................................... 4-11
4.3.3 How to Secure the STP Pump ............................................................................. 4-12
4.3.4 Legs for Securing the Base .................................................................................. 4-16
4.3.5 Vacuum Piping ..................................................................................................... 4-17
4.3.6 Connecting the Purge Port (For the corrosion resistant pump) ........................... 4-19
4.3.7 Connecting the Vent Valve .................................................................................. 4-20
4.4 External Power Supply Unit .............................................................................................. 4-22
4.5 Connecting the DC Power Cable ...................................................................................... 4-22
4.6 Connecting to Vacuum Equipment ................................................................................... 4-24
4.6.1 Connecting to Power ............................................................................................ 4-24
4.6.2 Emergency Off Circuit (EMO Circuit) ................................................................... 4-24
5 Baking, Cooling the STP Pump and Gas Pumping ........................................... 5-1
5.1 Baking the STP Pump ......................................................................................................... 5-1
5.1.1 Attaching a Baking Heater ..................................................................................... 5-1
5.2 Cooling the STP Pump ........................................................................................................ 5-2
5.3 Air-cooling Unit U0-64 ......................................................................................................... 5-4
5.3.1 Parts List ................................................................................................................ 5-4
5.3.2 Installation Procedure ............................................................................................ 5-4
5.3.3 Maintenance ........................................................................................................... 5-4
5.4 Air-cooling Unit U1-64 ......................................................................................................... 5-5
5.4.1 Parts List ................................................................................................................ 5-5
5.4.2 Installation Procedure ............................................................................................ 5-5
5.4.3 Maintenance ........................................................................................................... 5-5
5.5 Gas Pumping ...................................................................................................................... 5-6
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