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Edwards STP-iX455

Edwards STP-iX455
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STP-iX455/iXL455 Series Instruction Manual
4-19
Installation
4.3.6 Connecting the Purge Port (For the corrosion resistant pump)
When pumping reactive or corrosive gases in the corrosion resistant pump (type C or other
models), introduce a dry N
2
gas or other inlet gas into the STP pump in order to protect the
inside of the STP pump.
As shown in Figure 4.12, introduce a dry N
2
gas through needle valve or similar valve (must
be provided by the customer) into the purge port.
For instructions on how to introduce the purge gas, see Section 5.3, "Gas Pumping".
Figure 4.12 Connecting the Purge Port
Purge port (KF10)
Dry N
2
gas or other
Control unit

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