Edwards STP-iX455

STP-iX455/iXL455 Series Instruction Manual
4-18
Installation
Piping at the Inlet Port Flange
Attach the inlet port to the high vacuum side.
Refer to Table 15.1, "Specifications for the STP Pump" for the maximum working
pressure (pressure at the inlet port flange applicable continuously).
Piping at the Outlet Port Flange
Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
Refer to Table 15.1, "Specifications for the STP Pump" for the allowable backing pressure
(pressure at the outlet port flange applicable continuously).
◇ To attain the ultimate pressure shown in Table 15.1, "Specifications for the STP
Pump", set the pressure at the outlet port flange to 1.3 Pa (10
-2
Torr) or less.