STP-iX455/iXL455 Series Instruction Manual
13-6
Troubleshooting
13.2.2 No Indication of the "FAILURE" LED
Table 13.3 Troubleshooting with No Indication of the "FAILURE" LED
Symptom Probable cause Countermeasures
Section
does not illuminate
after powering ON the
external power supply
unit.
power cable.
Connect the power cable correctly.
voltage.
Check whether or not a power failure
has occurred.
LED does not flash
after performing the
start operation.
Operation Port"
setting.
Set the input operation port
correctly.
6.5
signal input pins (X2
REMOTE (1)–(3)) are
opened.
When not using this function, short
the circuits between (1)–(3), or open
the circuits between (24)–(25) of the
"X2 REMOTE" connector.
signal does not
function correctly.
enable signal input
pins are opened.
hort the circuits between
of the "X2 REMOTE" connector.
pressure.
backing-pump.
Check the capacity and starting
state (use a backing-pump having
more capacity that we specified).
15.1
system.
Check the piping system for leakage.
If the main composition is H
2
2
perform baking; if it is other gases,
clean the inside of the vacuum
equipment (If gases remain inside
the STP pump, contact Service office
when it is needed to be cleaned).
generated while the
pump is rotating
impact
Remove external vibration so as not to
transmit it to the STP pump.
◇ When external vibration or impact
causes the rotor to come in
contact with the touch down
bearing, contact noise is
generated from the STP pump.
Although the rotational noise of
the touch down bearing may last
approx. 10 to 20 seconds, this is
not an indication of abnormality.