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Edwards STP-iX455 User Manual
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STP-iX455/iXL455 Series Instruction Manual
15-6
.
Figure 15.3
Label
Affixi
ng Pos
itions for t
he STP
Pump
4
1
2
3
5
6
7
FAILURE
ROTATION
POWER
X5
STP-Link
X6
VENT
VALVE
X2
REMOTE
X1
DC
POWER
X4
X3
COM1
X
7
F
A
N
Turbomolecular Pump
SER
IA
L NO
:
MAN
UF
ACTU
RI
NG D
ATE
:
WEI
GH
T:
1
6
kg
RAT
ED
SPE
ED
:
55
,0
00 r
pm
M
ANUFACT
URED BY:Edwar
ds Japa
n Limi
ted.
1078-1,
Yoshihashi,Ya
chiyo-s
hi,Chi
ba,Japa
n
STP-iX455
CE
POW
ER
SUP
PL
Y
:
DC48
V
5A
Con
f
orm
s
to
U
L
Std
.
UL
61
010
-
1
9800546
T
N
I
E
R
T
E
K
D
E
T
S
I
L
CM
US
143
145
Table of Contents
Declaration of Conformity
2
Safety Precautions
3
Applied Standards
7
Limited Warranty
8
Precautions for Safe Operation of the STP Pump
15
Labels
16
Operation Principle of the STP Pump
17
Figure 2.1 Cross Sectional View of the STP Pump
18
Unpacking
19
Installation of the STP Pump
21
Figure 4.1 Configuration of the STP Pump
22
Name and Function of the Control Unit
23
Figure 4.3 Control Unit (Rear Panel)
25
Precautions before Installation
26
Table 4.1 Operating Environment
27
Installation Area
28
How to Install the STP Pump
29
Cleaning the Seal
30
STP Pump Installation Positions
31
How to Secure the STP Pump
32
Table 4.3 Destructive Torque and Recommended Securing Bolt for Inlet Port Flange
33
Table 4.4 Number of Claw Clamps by Size of Flange
34
Legs for Securing the Base
36
Vacuum Piping
37
Connecting the Purge Port (for the Corrosion Resistant Pump)
39
Connecting the Vent Valve
40
External Power Supply Unit
42
Table 4.6 Pin Assignment for Connector X1
43
Connecting to Vacuum Equipment
44
Baking, Cooling the STP Pump and Gas Pumping
45
Cooling the STP Pump
46
Figure 5.2 Air-Cooling Unit U0-64
47
Air-Cooling Unit U0-64
48
Air-Cooling Unit U1-64
49
Gas Pumping
50
How to Start/Stop the STP Pump
51
Stop Procedures
52
Starting/Stopping the STP Pump
53
Starting the STP Pump after Stopping
54
Figure 6.3 "ROTATION" LED Indication
55
Remote Input/Output Signal Connector
57
Input Signal Pins
58
Figure 7.2 X2 REMOTE Input Signal Pins
60
Input Operation Port Setting
61
Output Signal Pins
62
Table 7.5 Rated Contacts for Relays CR1 to CR7
63
Vent Valve Output, Air-Cooling Unit Output, and General-Purpose Output
65
Air-Cooling Unit Output, and General-Purpose Output
66
Serial Communication Protocol
67
Connection and Setting up
68
Connecting the RS485
69
Communication Parameter Setting
70
Serial Communication Timeout Setting
71
Recommended Items about Communication Cable Installation
72
Figure 9.5 Example of Ring Ferrite Core Installation
73
Figure 9.7 Example of Differential Signal Waveform
74
Protocol Specifications
75
Control Command (in the RS232/RS485 Single Point Connection)
76
Query Command (in the RS232/RS485 Single Point Connection)
77
Transmission Data Format
78
Error Control
79
Control Command in the RS485 Multi-Point Connection
80
Query Command in the RS485 Multi-Point Connection
81
Broadcasting Command in the RS485 Multi-Point Connection
82
Application Note
83
Figure 9.9 Example of Answer Resending Process
84
Figure 9.12 Example of Communication Cycle Process
85
Figure 9.13 Example of Command Sending Process
86
Command Specifications
87
Readmeas
88
Command
89
Readfailmess
90
Table 9.9 Error Values
91
Readmodfonct
92
Table 9.10 Pump Operation Mode
93
Readversion
94
Readcounters
95
Readmotortemp
96
Readevents
97
Setspeedsetpoint
98
Readspeedsetpoint
99
Readmodfonctwithwarning
100
Table 9.11 Warning Value Bit Assign
101
Readmeasvalue
102
Readoptionfunc
104
Table 9.12 Parameter Setting Value
105
Setoptionfunc
107
Readcondition
109
Readeventswithtime
111
STP-Link and Display Unit
115
Display Unit
116
Safety Functions
117
Operation after a Power Recovery
118
Overheating Inside the STP Pump (MOTOR Overheat)
119
WARNING Function
121
Contents of WARNING Function
122
WARNING Function Setting
123
Troubleshooting, Maintenance, and Inspection
125
Troubleshooting
126
Table 13.2 Error List
127
No Indication of the "FAILURE" LED
130
Maintenance and Inspection
131
Cleaning and Decontamination
132
Maintenance
133
Recommended Maintenance Intervals for Main Parts
134
Transport for Repair or Overhaul
135
Storage and Disposal
137
Specifications and Accessories
139
Accessories
141
Figure 15.1 External Appearance of the STP Pump (STP-Ix455 Series)
142
Figure 15.2 External Appearance of the STP Pump (STP-Ixl455 Series)
143
Figure 15.3 Label Affixing Positions for the STP Pump
144
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Edwards STP-iX455 Specifications
General
Brand
Edwards
Model
STP-iX455
Category
Water Pump
Language
English
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