STP-iX455/iXL455 Series Instruction Manual
15-1
Specification
15 Specifications and Accessories
15.1 Specifications for the STP Pump
Table 15.1 Specifications for the STP Pump (1/2)
Item
Specifications
STP-iX455 STP-iXL455
Flange size
Inlet port flange
VG100/
ISO100
VG150/
ISO160
ISO100 ISO160
Pumping
speed
N
2
L/s
300 450 300 380
H
2
L/s
300 460 300 380
Compression
ratio
N
2
8
H
2
1×10
4
Ultimate
pressure
Pa (Torr)
Without
anti-corrosive
treatment
ICF
10
-8
(10
-10
)
VG/ISO
6.5×10
-6
(5×10
-8
)
Corrosion
resistant type
-7
-9
VG/ISO
6.5×10
-6
(5×10
-8
)
(Natural air)
Pa (Torr)
1.3×10
-1
(1×10
-3
)
Allowable backing pressure
(Natural air)
Pa (Torr)
67 (0.5)
≦6
≦8
μm(0–P)
Leakage
magnetic
flux
direction
mGauss
≦100
Radial
direction
mGauss
≦100
(Air cooling: At baking and gas pumping)
Ambient temperature range
Storage temperature range
*1
The values shown in the table are typical; they are not guaranteed.
*1
: Except the optional accessory.