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Edwards STP-iX455

Edwards STP-iX455
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STP-iX455/iXL455 Series Instruction Manual
4-24
Installation
4.6 Connecting to Vacuum Equipment
The STP pump and the external power supply unit are considered components when used
with the vacuum equipment.
Consider the followings when designing the vacuum equipment.
4.6.1 Connecting to Power
The external power supply unit receives its power from the vacuum equipment electrical
distribution system via a circuit breaker. Electrical energy isolation (Lockout/Tagout) is
achieved by opening the main disconnect device or circuit breaker of the vacuum
equipment, thereby: removing power from the STP pump.
Provide the equipment with the main disconnect or circuit breaker devices rated for at
least 10,000 A
rms
symmetrical amperes interrupting capacity (AIC).
4.6.2 Emergency Off Circuit (EMO Circuit)
Activation of the EMO circuit of the equipment will interrupt electrical power to the STP
pump. When the power is shut off, the STP pump will coast down and eventually land on
the touch down bearings.
Consider the followings when establishing the EMO circuit.
Unite the exhaust gas system to prevent atmosphere from being introduced into
the STP pump when the EMO circuit operates (example: shut the valve). When
atmosphere is introduced into the STP pump, the touch down bearing may not
operate normally.
The STP pump rotates for a while after the EMO circuit shuts off the power.
Perform a recovery operation after the STP pump has stopped completely.
Before performing the operation check of the EMO circuit with regular
maintenance, stop the STP pump to prevent damage to the touch down bearing.
Procure the main disconnect device and the EMO circuit at your company.
Use the main disconnect device which is lockable only in the deenergized position.
Locate the main disconnect device and the EMO button in the place where
personnel is not be exposed to any hazards during operation.

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