STP-iX455/iXL455 Series Instruction Manual
4-21
Installation
◇ Control the amount of the atmosphere or dry N
2
gas at 8.4×10
-1
Pa・m
3
/s (500
SCCM) or less when introducing from the vent valve.
◇ The atmosphere or dry N
2
gas introduction at the vent valve may result in a noise.
This is not abnormality/error.
◇ When not using the purge port, close it with the blanking flange (attached on
delivery).
To Next Page
Loading...
