PLATINOUS SERIES CONTROLLER MANUAL
74
6.9. Ending in the Program Mode
1. Get the Operation Mode Selection screen.
Press either the OPER./START key on the operating panel or the chamber operating status
box on the screen.
2. Stop the program.
Press the STOP button under Stop Operation.
3. A message confirming whether to execute the operation or not will be displayed.
Yes button
: Stops the selected program and returns the
display to the original screen.
No button
: Cancels the command and returns the display to
the Operation Mode Selection screen. The
chamber’s operating status does not change.
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