tirb45e1 (2019-02) CDGxxxDxx.cp 65
[7] www.inficon.com
Operating Manual
Stripe CDG100Dhs
tina95d1 (German)
tina95e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
[8] www.inficon.com
Operating Manual
Stripe CDG160Dhs, CDG200Dhs
tinb45d1 (German)
tinb45e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
[9] ETG.1000.2: Physical Layer service definition and protocol specification
[10] ETG.1000.3: Data Link Layer service definition
[11] ETG.1000.4: Data Link Layer protocol specification
[12] ETG.1000.5: Application Layer service definition
[13] ETG.1000.6: Application Layer protocol specification
[14] ETG.1020: EtherCAT Protocol Enhancements
[15] ETG.2000: EtherCAT Slave Information
[16] ETG.5001.1: Modular Device Profile – Part 1: General MDP Device
Model
[17] ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile – Part 1:
Common Device Profile (CDP)
[18] ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure Gauge
[19] IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications
[20] IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3
[21] SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR
NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES
[22] SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers