5 - 7
IPN 074-505-P1E
IC6 Operating Manual
BACKUP SENSOR . . . . . . 0 to 8
Select the sensor to use if the primary sensor fails. This parameter only
appears if Multipoint has been set to No. Default is 0, which disables the
function. This parameter cannot be changed when a material is running.
BACKUP TOOLING. . . . . . 1.0 to 999.9%
Sets the Tooling factor for the backup sensor if one has been selected.
Visible only if Multipoint is set to No. Default value is 100%.
When Multipoint is set to Yes (1)
AGGREGATE MULTIPLY . No (0), Yes (1)
Default setting is No. For multiple sensor deposition control applications
the parameter AGGREGATE MULTIPLY (Yes/No) determines whether
a multiplier is calculated for a crystal’s rate information if a crystal fail
occurs during deposition. This multiplier is used only during the layer in
which the crystal failure occurs. After this layer is finished, the multiplier
is cleared. Use of AGGREGATE MULTIPLY affects calculation of the
aggregate rate as shown in Table 5-1. (Assume all Sensor Weights are
the same.)
Table 5-1 Aggregate multiplier effect
Condition of the
deposition
Sensor
#1
Rate (Å)
Sensor
#2
Rate (Å)
Sensor
#3
Rate (Å)
Sensor
#4
Rate (Å)
Aggregate
Rate (Å)
Aggregate
Multiplier
Beginning 10101010 10 1
Later in the Deposition 16 10 10 4 10 1
If #1 fails, notice what
happens to the aggregate
rate if the aggregate
multiplier is not calculated.
Xtal Fail 10 10 4 8 1
An AGGREGATE
MULTIPLIER is calculated
as the ratio of the aggregate
rate before the sensor failure
(using an average rate for
the failed sensor prior to
failure) divided by the
aggregate rate after the
sensor failure (without the
failed sensor’s rate
information).
With: 10
Without:
8
Ratio
1.25
To Next Page
Loading...
