Inficon IC6

11 - 6
IPN 074-505-P1E
IC6 Operating Manual
11.3 IC6 Cygnus Emulation
The IC6 has features that allow it to meet the critical requirements of Cygnus
applications in OLED manufacturing.
Cygnus emulation features:
 ability to run up to six layers simultaneously and show rate, thickness, power
and state for each layer
 crosstalk correction between three co-deposited pairs of the six active layers
 suspend (stop) individual layers. Stop stops all active layers, suspend only acts
on an individual layer
 maintain a layer in rate control but with the source/substrate shutter closed and
without incrementing the thickness (NonDepCntl)
 12 DAC outputs providing flexibility to record rate, power, and thickness
associated with sensors, sources and materials
 ability to transition from deposit to non-deposit control using remote
communications or logic statements
 three thickness equations to use in logic statements to allow state sequencing
based on the sum of thicknesses of up to six active layers
 rate averaging interval up to 30 seconds for highest noise reduction for very low
rates
 rate setpoint can be entered to 0.001 Angstroms/second accuracy.