Inficon IC6

15 - 34
IPN 074-505-P1E
IC6 Operating Manual
15.9.1 Diagnostic Procedures
The following diagnostic procedures employ the Crystal Sensor Emulator to
analyze a constant Crystal Fail message. The symptom is a Crystal Fail message
that is displayed by the Deposition Controller even after the monitor crystal has
been replaced with a new good monitor crystal.
NOTE: The Unable To Auto-Z message will be displayed if the Crystal Sensor
Emulator is attached to a deposition controller and you are attempting to
use the Auto-Z feature. This is to be expected and is normal.
15.9.1.1 Measurement System Diagnostic Procedure
1 Refer to Figure 15-8 on page 15-33. Remove the six-inch BNC cable from the
feedthrough at point A.
2 Connect the Crystal Sensor Emulator to the 6 inch BNC cable at Point A.
 If the Crystal Fail message disappears after approximately five seconds,
the measurement system is working properly. Re-install the six-inch BNC
cable to the feedthrough. Go to section 15.9.1.2.
 If the Crystal Fail message remains, continue at step 3.
3 Disconnect the six-inch BNC cable from the Oscillator and from the Emulator.
4 Visually inspect the six-inch BNC cable to verify that the center pins are seated
properly.
5 Use an Ohm meter to verify the electrical connections on the six-inch BNC
cable.
 There must be continuity (<0.2 ohms after accounting for resistance of
ohmmeter leads) between the center pins.
 There must be isolation (>10 megohms) between the center pins and the
connector shield.
 There must be continuity between the connector shields.
Replace the six-inch BNC cable if it is found to be defective and repeat Step 2
of this procedure.
6 If the six-inch BNC cable is not defective, re-connect the six-inch cable to the
oscillator and to the Crystal Sensor Emulator. If the Crystal Fail message
remains, contact INFICON.