5 - 8
IPN 074-505-P1E
IC6 Operating Manual
AGGREGATE RATE CALCULATION EXAMPLE
Displayed Rate = Applied Rate * Master Tooling * Sensor Tooling
Relative Weight = Sensor Weight / Weights
Contribution Rate = Displayed Rate * Relative Weight
Aggregate Rate = Contribution Rates. This is the rate that will be displayed on the
Operate screen.
The Displayed Rate is the rate for each sensor displayed on the Sensor Information screen.
It reflects the effects of Master Tooling and Sensor Tooling and is not affected by the Weight
parameter.
Regardless of which sensor fails, the aggregate rate will remain the same.
Applying the multiplier to all
future aggregate rate results:
Xtal Fail 10 10 4 10 1.25
If during the deposition the
use of the aggregate
multiplier is turned off, the
aggregate rate reverts back
to:
Xtal Fail 10 10 4 8 not used
If the layer has not finished, the use of AGGREGATE MULTIPLY may be turned back on and the
previously calculated multiplier (in this case 1.25) will continue to be used.
Table 5-1 Aggregate multiplier effect (continued)
Condition of the
deposition
Sensor
#1
Rate (Å)
Sensor
#2
Rate (Å)
Sensor
#3
Rate (Å)
Sensor
#4
Rate (Å)
Aggregate
Rate (Å)
Aggregate
Multiplier
Table 5-2 Aggregate rate example data
Sensor 1234Unit
APPLIED RATE 2 4 2.667 1 Å/s
MASTER TOOLING 200 %
SENSOR TOOLING 100 50 75 200 %
DISPLAYED RATE 4444Å/s
SENSOR WEIGHT 50 100 75 25 %
WEIGHTS 250 %
RELATIVE WEIGHT 0.2 0.4 0.3 0.1 N/A
CONTRIBUTION RATE 0.8 1.6 1.2 0.4 Å/s
AGGREGATE RATE 4 Å/s
To Next Page
Loading...
