6
Maintenance
Cleaning the Q00 Ion Optics
100 TSQ Series Hardware Manual Thermo Scientific
Figure 60. Ion optics cage assembly, installed
7. Reinstall the three ion optics cage assembly screws that fasten the cage assembly to the ion
source mount assembly. See Figure 54 on page 93.
8. Plug in the ion source cable harness connector. Secure the connector. See Figure 53 on
page 93.
9. Reinstall the roughing pump adapter access plate and screws. See Figure 52 on page 92.
10. Reinstall the ion source interface cover and screws. See Figure 51 on page 92.
Reinstalling the Ion Source Interface Assembly
Reinstall the ion source interface assembly as described in the topic “Reinstalling the Ion
Source Interface Assembly” on page 90.
Reinstalling the Ion Max or Ion Max-S Ion Source Housing
Reinstall the Ion Max or Ion Max-S ion source housing as described in the topic “Installing
the Ion Max or Ion Max-S Ion Source Housing” on page 71.
Starting Up the System
Start up the system as described in the topic “Starting Up the System after a Complete
Shutdown” on page 54.
Recess in bottom of ion source
mount assembly
Cable harness