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Functional Description
Mass Spectrometer
Thermo Scientific TSQ Series Hardware Manual 37
Vacuum System and Inlet Gases Hardware
The vacuum system evacuates the region around the ion source interface, ion optics, mass
analyzer, and ion detection system. The principal components of the vacuum system include
the following:
• Vacuum manifold
• Turbomolecular pump
•Forepump
•Convectron™
gauges
•Ion gauges
The inlet gases hardware controls the flow of collision gas, sheath gas, auxiliary gas, and air
(during venting) into the mass spectrometer. The inlet gasses hardware includes the following
components:
•Vent valve
• Collision gas flow control valves
• Sheath gas valve
• Auxiliary gas valve
A functional block diagram of the vacuum system and inlet gasses hardware is shown in
Figure 30.