2
Functional Description
Mass Spectrometer
38 TSQ Series Hardware Manual Thermo Scientific
Figure 30. Functional block diagram of the vacuum system and inlet gasses hardware
Vacuum Manifold
The vacuum manifold encloses the ion source interface, ion optics, mass analyzer, and ion
detection system assemblies. The vacuum manifold is a thick-walled, aluminum chamber with
two removable side cover plates, with openings on the front, sides, and top, and various
electrical feedthroughs and gas inlets.
The vacuum manifold is divided into four chambers by three baffles. See Figure 31. The
forepump evacuates the region inside the first chamber, called the ion transfer tube/skimmer
region. The third inlet in the molecular drag section of the triple-inlet turbomolecular
vacuum pump evacuates the region inside the second chamber, called the Q00 ion optics
region. The interstage port of the turbomolecular vacuum pump evacuates the region inside
the third chamber, called the Q0 ion optics region. The high vacuum port of the
turbomolecular pump evacuates the region inside the fourth chamber, called the analyzer
region, to less than 10
–
5
Torr. The turbomolecular pump in turn discharges into the
forepump through the foreline.
Atmospheric
pressure
region
(760 Torr)
Ion
transfer
tube/
skimmer/
S-lens
region
Q00
ion optics
region
Q0
ion optics
region
Analyzer
region
(1×10
-5
Torr)
(or less)
HPLC
(or other
sample input
device)
Convectron
gauge
Forepump(s)
Exhaust
Triple-inlet
turbomolecular pump
Collision gas
divert valve
Collision
Convectron
gauge
Ion
gauge
Collision
cell
Vent
valve
Nitrogen
gas port
Sheath
gas
Sweep
gas
Auxiliary
gas
Sample tube
Argon
Nitrogen
gas port