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Functional Description
Mass Spectrometer
Thermo Scientific TSQ Series Hardware Manual 39
Figure 31. Vacuum manifold (interior)
The collision cell chamber, inside the analyzer chamber, has a user controlled argon pressure
of between one and four mTorr when CID is turned on. Argon in the collision cell is
evacuated by the forepump when CID is turned off.
The vacuum manifold has the following feedthroughs and inlets:
• A feedthrough for the high voltage for the conversion dynode
• A feedthrough for the high voltage for the electron multiplier
• A feedthrough for the ion current signal from the anode of the electron multiplier
• Two feedthroughs for the Q1 quadrupole rf voltage
• Two feedthroughs for the Q3 quadrupole rf voltage
• A feedthrough for the Q2 quadrupole rf voltage
• A feedthrough for lens L21, L22, L23, L31, L32, and L33 voltages
Turbomolecular pumpIon gaugeO-ring
Collision cell
chamber
Analyzer
chamber
Baffle
Q0 ion optics
chamber
Convectron
gauge
Baffle
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