5977B Series MSD Troubleshooting and Maintenance Manual 5
To Replace the DP Fluid 120
To Install the DP 123
To Remove the Foreline Gauge 125
To Install the Foreline Gauge 127
To Refill the EI Calibration Vial 128
To Purge the Calibration Valves 130
To Remove the EI Calibration and Vent Valve Assembly 131
To Install the EI Calibration and Vent Valve Assembly 132
To Replace the Fan for the High Vacuum Pump 133
To Remove the Ion Vacuum Gauge 135
To Install an Ion Vacuum Gauge 136
To Lubricate the Side Plate O-Ring 137
To Lubricate the Vent Valve O-Ring 139
Maintaining the Electronics 141
To Adjust the Quad Frequency 143
To Replace the Primary Fuses 145
5 CI Maintenance
To Replace the Methane/Isobutane Gas Purifier 148
To Clean the Reagent Gas Supply Lines 149
To Refill the CI Calibrant Vial 150
6Vacuum System
Overview 154
Vacuum System Components 155
Common Vacuum System Problems 156