6 5977B Series MSD Troubleshooting and Maintenance Manual
Foreline Pump 157
High Vacuum Pump 161
Diffusion pump system 161
Turbo pump system 161
Analyzer Chamber 162
Diffusion pump version 162
Turbo pump version 162
Side Plate 163
Vacuum Seals 166
Foreline Gauge 168
Diffusion Pump and Fan 169
Turbo Pump and Fan 175
Calibration Valves and Vent Valve 176
Micro-Ion Vacuum Gauge 179
7Analyzer
Overview 182
EI Ion Source 185
HES EI Ion Source 192
CI Ion Source 195
Filaments 199
Other Source Elements 201
Quadrupole Mass Filter 203
Detector 206
Analyzer Heaters and Radiators 208