7-12
Prober Control Script
• Prober information file
prober_info.ini
• Start Procedure
Start_xxxx.exe
• Iteration Procedure
Iterator_xxxx.exe
• Final Procedure
Final_xxxx.exe
• Subsite Procedure
Subsite_xxxx.exe
xxxx:
• cascade
• suss
• vector
Use prober control script in EasyEXPERT
Repeat Measurement Setup window
Prober control script is sample program used for semi-automatic prober control. The Agilent
EasyEXPERT can call the script by using the Repeat Measurement Setup window.
See page 7-9 to call the script and perform repeat measurement.
See page 7-14 for the prober information file.
See page 7-13 for the start procedure.
See page 7-15 for the iteration procedure.
See page 7-16 for the final procedure.
See page 7-17 for the subsite procedure.
To use the prober control script, specify the start/iteration/final procedure in the Repeat
Measurement Setup dialog box (see page 7-9). And use the Subsite move test setup in your
quick test to control sub die move. The Subsite move setup uses the subsite procedure for
moving wafer chuck to the next subsite. See page 7-10 and 7-11.
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