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CMU Calibration
Calibration
The CMU Calibration screen is used to perform the measurement data correction of the multi
frequency capacitance measurement unit (MFCMU). For the easy way, perform the phase
compensation and the open correction at least. The check boxes left of the Open/Short/Load
Correction and the Phase Compensation are effective after the corresponding measurement is
performed.
Measure…: Opens a dialog box used to perform correction/compensation data measurement. To
perform the measurement, follow the dialog box.
Advanced Options…: Opens the “Advanced Options for CMU Calibration” dialog box used to set
the frequencies for the correction data measurement and the reference values of the working
standard. See the next page.
To perform the open correction and the phase compensation, open the measurement terminals.
To perform the short correction, connect the measurement terminals together.
To perform the load correction, connect your load standard between the high terminal and the
low terminal.
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