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Table of Contents
1. SmartScan 350/550 Overview ................................................................................................................ 7
2. ESD Scanner Outline.................................................................................................................................... 7
2.1. Configuration Diagram....................................................................................................................................... 7
2.2. Main Components of ESD Scanner ................................................................................................................ 8
3. Understanding the Terminology ............................................................................................................ 9
4. ESD Scanner Operation Procedures ................................................................................................... 10
4.1. Create "Workspace" and "Project" .............................................................................................................. 10
4.2. Calibrate Probe Z Offset ................................................................................................................................... 12
4.3. Take a Picture of DUT ....................................................................................................................................... 15
4.4. Define Scan Area and Height ......................................................................................................................... 17
4.5. Calibrate Probe XY Offset ................................................................................................................................ 23
4.6. Create a New Failure Detection (FD) Project ......................................................................................... 27
4.6.1. Create an “FD Project” ............................................................................................................................ 27
4.6.2. Set up Analog and Digital Channels................................................................................................... 31
4.6.3. Timing Setting ............................................................................................................................................ 36
4.6.4. Start Monitoring ........................................................................................................................................ 37
4.6.5. Threshold ..................................................................................................................................................... 37
4.7. Set Macros ............................................................................................................................................................. 40
4.8. Instrument Settings ........................................................................................................................................... 42
4.9. Start ESD Scan ...................................................................................................................................................... 45
5. Reviewing measurement data .............................................................................................................. 47
5.1. 3D Plot Options ................................................................................................................................................... 48
5.1.1. Selecting a Plot Type ............................................................................................................................... 48
5.1.2. Show Plot as 3D ......................................................................................................................................... 49
5.1.3. 3D Browser ................................................................................................................................................. 50
5.1.4. Show Legend, Peak and Grid ................................................................................................................ 52
5.1.5. Track Point .................................................................................................................................................. 53
5.1.6. Transparency of Data Plots .................................................................................................................. 54
5.2. Data Visualization Options ............................................................................................................................. 54
5.2.1. 3D Plot Display Options ......................................................................................................................... 54
5.2.2. 3D Plot Range ............................................................................................................................................. 56
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