3
5.3. Cut Planes Option ............................................................................................................................................... 56
5.4. Data Selection ...................................................................................................................................................... 58
5.5. Peak Search Option ............................................................................................................................................ 61
6. Data Export .................................................................................................................................................. 62
Appendix-A ........................................................................................................................................................... 64
1. Image Stitching .................................................................................................................................................... 64
2. Import DUT Image ............................................................................................................................................. 65
List of Figures
Figure 1: Block diagram of the ESD scanner. ................................................................................ 8
Figure 2: Opening window of SmartScan V5.0. ........................................................................... 10
Figure 3:Workspace definition window........................................................................................ 11
Figure 4:Project definition window. ............................................................................................. 11
Figure 5:SmartScan window after a "Project" (ESD-1) has been created. ................................... 12
Figure 6: Probe Z offset example.................................................................................................. 13
Figure 7:Open "Probe Settings" window. ..................................................................................... 13
Figure 8:"Probe Tip Offset Calibration" window for probe Z offset. ........................................... 13
Figure 9:"Robot Movement" window. .......................................................................................... 14
Figure 10: Z offset number has been updated. .............................................................................. 14
Figure 11: "Snapshot" icon and "Take snapshot" shortcut. .......................................................... 15
Figure 12: "Snapshot" window. .................................................................................................... 16
Figure 13: DUT picture in scan area. ............................................................................................ 16
Figure 14: Zoomed in DUT picture. ............................................................................................. 17
Figure 15: Click left mouse button to define polygon scan area. ................................................. 18
Figure 16: Polygon scan area as defined....................................................................................... 18
Figure 17: Cut out polygon area. .................................................................................................. 19
Figure 18: Scan Area Properties pane. .......................................................................................... 19
Figure 19: Multiple scan area definition. ...................................................................................... 20
Figure 20: Detect selected area height by touch sensor. ............................................................... 20
Figure 21: Make sure touch sensor is working. ............................................................................ 21
Figure 22: Start the height measurement using touch sensor. ...................................................... 21
Figure 23: Scan height shown in the "Scan Area Properties" pane. ............................................. 21
Figure 24: Get area height by moving robot. ................................................................................ 22
Figure 25: Robot movement window pops up. ............................................................................. 22
Figure 26: Probe tip barely touching the DUT. ............................................................................ 22
Figure 27: Assign measured height to selected area. .................................................................... 23
Figure 28: Scan height shown in the "Scan Area Properties" pane. ............................................. 23
Figure 29: XY Offset top view. .................................................................................................... 24
Figure 30: Define reference point. ................................................................................................ 24
Figure 31: Reference point setting. ............................................................................................... 25
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