Edwards nEXT730 - Page 25

B8J200880_E - Technical data
Page 24
Table 3 Technical data nEXT730, nEXT930
nEXT
730D
730D
930D
930D
730H
730H
730Q
930Q
High-vacuum connection
DN
160 ISO-K
160 CF
200 ISO-K
200 CF
160 ISO-K
160 CF
160 ISO-K
200 ISO-K
Forevacuum connection
DN
25 KF
Pumping speed for
†
N
2
730
690
925
870
720
680
730
925
Ar
I · s
-1
665
620
865
810
655
610
665
865
He
820
760
905
840
850
790
820
905
H
2
715
670
735
690
755
710
715
735
Gas throughput
N
2
14
4
>40
Ar
mbar · I · s
-1
3.5
2.6
6.8
He
21
7
>50
H
2
> 14
17
>50
Compression ratio
‡
N
2
> 1 x 10
11
> 1 x 10
13
> 1 x 10
8
Ar
> 1 x 10
11
> 1 x 10
13
> 1 x 10
8
He
1 x 10
8
5 x 10
9
1 x 10
5
H
2
4 x 10
6
3 x 10
8
1 x 10
4
Ultimate pressure
§
mbar
7 x 10
-9
3 x 10
-10
7 x 10
-9
3 x 10
-10
7 x 10
-9
1 x 10
-10
1 x 10
-7
Maximum permissible
forevacuum pressure for N
2
mbar
15
12
6
Operating speed
min
-1
49200
Run-up time, approximately
min
2.5
Maximum power consumption
W
500 (default), 600 (maximum)