3.SP Mode Tables
57
2-
180-
003
Line Pos. Adj. Clear MUSIC Result ENG [ 0 or 1 / 0 / 1 ]
2-
181-
003
Line Position Adj. Result Skew: M ENG* [ -5000 to 5000 / 0 /
0.001um ]
2-
181-
011
Line Position Adj. Result M. Cor.: Dot: M ENG* [ -512 to 511 / 0 /
1dot ]
2-
181-
012
Line Position Adj. Result M. Cor.: Subdot: M ENG* [ -1 to 1 / 0 / 0.01dot ]
2-
181-
015
Line Position Adj. Result Left Mag.: Subdot: M ENG* [ -32 to 32 / 0 /
0.01dot ]
2-
181-
016
Line Position Adj. Result Right Mag.: Subdot: M ENG* [ -32 to 32 / 0 /
0.01dot ]
2-
181-
017
Line Position Adj. Result S. Cor.: 600 Line: M ENG* [ -16384 to 16383 / 0 /
1line ]
2-
181-
018
Line Position Adj. Result S. Cor.: 600 Sub: M ENG* [ -1 to 1 / 0 /
0.001line ]
2-
181-
019
Line Position Adj. Result S. Cor.: 1200 Line: M ENG* [ -16384 to 16383 / 0 /
1line ]
2-
181-
020
Line Position Adj. Result S. Cor.: 1200 Sub: M ENG* [ -1 to 1 / 0 /
0.001line ]
2-
181-
021
Line Position Adj. Result Skew: C ENG* [ -5000 to 5000 / 0 /
0.001um ]
2-
181-
029
Line Position Adj. Result M. Cor.: Dot: C ENG* [ -512 to 511 / 0 /
1dot ]
2-
181-
030
Line Position Adj. Result M. Cor.: Subdot: C ENG* [ -1 to 1 / 0 / 0.01dot ]