Ulvac C30HVRT - Page 12

Table of Contents
II ULVAC CRYOGENICS INCORPORATED
Section 6 Wiring and Piping Removal and Storage .......................................................... 6-1
6.1 Removal of wiring and piping and displacement of compressor ........................ 6-1
6.2 Maintenance in storage ...................................................................................... 6-2
Section 7 Maintenance ..................................................................................................... 7-1
7.1 Scheduled Maintenance ..................................................................................... 7-1
7.2 Replacement of Adsorber ................................................................................... 7-1
7.3 Adjusting System Helium Pressure .................................................................... 7-5
7.4 Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical
Wiring ............................................................................................................... 7-10
7.5 Maintenance Parts ............................................................................................ 7-10
Section 8 Troubleshooting ........................................................................................... 8-1
8.1 Problem types ..................................................................................................... 8-1
8.2 Troubleshooting procedures ............................................................................... 8-2
8.3 Alarm code descriptions ..................................................................................... 8-4
Appendix A Operating Log ············································································· A-1
Appendix B Not in this book
Appendix C C30HVRT
Schematic Diagram ······················································· C-1
Appendix D C30HVRT Compressor Flow Diagram ·············································· D-1
List of Figures
Figure 1-1 C30HVRT External view ...................................................................... 1-2
Figure 1-2 C30HVRT Compressor dimensions ..................................................... 1-3
Figure 1-3 Compressor front view ......................................................................... 1-5
Figure 1-4 Compressor rear view .......................................................................... 1-6
Figure 1-5 Anchor bolts mounting positions (example) ......................................... 1-7
Figure 2-1 Required space for compressor installation (scale: mm) and levelness2-2
Figure 2-2 Equipment-side power circuit ............................................................... 2-3
Figure 2-3 Cooling water flow rate, water supply temperature, and water
pressure loss ........................................................................................ 2-5
Figure 2-4 Remote input interface circuit .............................................................. 2-7
Figure 2-5 Remote output interface circuit ............................................................ 2-7
Figure 2-6 Figure 2-6 Timing chart for Alternate operating mode ....................... 2-10
Figure 2-7 Timing chart for Momentary operating mode ..................................... 2-10
Figure 2-8 Signal delay when powered on（In Alternate operating mode） ........... 2-11
Figure 2-9 Signal delay when the time period from a stop to a restart is short .... 2-11
Figure 2-10 Timing chart of C30HVRT when a short power interruption occurs ... 2-12
Figure 3 1 Appearance of a Compressor Carton .................................................... 3-1
Figure 3 2 Remove Cardboard and Insert Forks underneath the Compressor ...... 3-3