Table of Contents
IV ULVAC CRYOGENICS INCORPORATED
List of Tables
Table 1-1
Compressor weight .............................................................................. 1-3
Table 1-2 Power supply rating ............................................................................. 1-4
Table 1-3 Cooling water requirements ................................................................. 1-4
Table 1-4 Installation environment and operation requirements .......................... 1-4
Table 1-5 Electromagnetic environment resistance characteristics ..................... 1-5
Table 2-1 Input power cable specifications .......................................................... 2-2
Table 2-2 Control and signal wire gauges ............................................................ 2-3
Table 2-3 Recommended cooling water for compressor ..................................... 2-4
Table 2-4 Standard cables and flexible hoses ..................................................... 2-6
Table 2-5 Remote interface specifications ........................................................... 2-6
Table 2-6 Remote interface signals ..................................................................... 2-8
Table 3-1 Carton Contents .................................................................................... 3-3
Table 3-2 Flexible hose specifications .................................................................. 3-4
Table 5-1
Supply line helium pressure during operation ...................................... 5-4
Table 7-1 Scheduled maintenance ....................................................................... 7-1
Table 7-2 Preparation for Adding Helium Gas ...................................................... 7-7
Table 7-3 Maintenance Parts .............................................................................. 7-10
Table 8-1 List of troubleshooting before operation .............................................. 8-2
Table 8-2 List of troubleshooting during operation ............................................... 8-3
Table A-1 Operating log ........................................................................................ A-1
Table C-1 Setting and connections of controller ................................................... C-1