Compressor Unit Instruction Manual
⑩CRYOCOOLER CABLE RECEPTACLE （COLD HEAD POWER NO.1）
Connect the cryocooler cable for its operation to the receptacle.
C30HVRT has one receptacle (No.1).
⑪HIGH PRESSURE HELIUM SUPPLY CONNECTOR （SUPPLY GAS）
High pressure helium gas is supplied to the cryocooler through this connector. A 1/2
self-sealing coupling is used.
Refer to “Section 1.4 Roles of compressor in cryocooler system” to understand the
operation of helium closed-loop cryocooler system.
Also refer to “Section 4.3 connecting and disconnecting helium flexible hoses” for
connection method of helium lines.
⑫LOW PRESSURE HELIUM RETURN CONNECTOR （RETURN GAS）
Connect a return line of low pressure helium gas from cryocooler to this connector. A
1/2 self-sealing coupling is used.
Refer to “Section 1.4 Roles of compressor in cryopump system” to understand the
operation of helium closed-loop cryocooler system.
Also refer to “Section 4.3 connecting and disconnecting helium flexible hoses” for
connection method of helium lines.
⑬COOLING WATER INLET (WATER IN）
Cooling water from customer’s facility is supplied through this inlet to cool the
compressor during operation. Customers need to have cooling water piping as a part
of the facility.
Refer to “Section 4.2 Connecting cooling water piping” for connection of cooling water.
⑭COOLING WATER OUTLET （WATER OUT）
Cooling water used in the compressor returns from this outlet to customer’s facility.
Refer to “Section 4.2 Connecting cooling water piping” for connection of cooling water.
⑮REMOTE INPUT-OUTPUT RECEPTACLE （REMOTE RESPONSE）
Connect the remote cables to this receptacle.
The cryocooler and the compressor can be operated through the remote cables. It also
enables sending of operation answer-back signals and alarm signals activated in an
event of compressor failure to the equipment-side. Refer to “Section 2.5 Remote
functions” for details of remote functions.
The plug for remote cables is supplied with the compressor. Customers need to solder
the cables to use it. Refer to “Section 4.5.2 Connecting remote cables” for definitions of
connector pin assignments and appropriate connection method for your application.
ULVAC CRYOGENICS INCORPORATED 1-9
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