C30HVRT Compressor Unit Instruction Manual
Revision History
Date Revision No. Contents
2013-03-29
2013-05-28
2014-05-23
2016-11-15
2013.03
2013MY01
2014MY02
2016NR03
First edition.
P.1-4 Table 1-2,Stationary power consumption and Stationary
electric current consumption have been changed.
“Introduction” and “SERVICE NETWORK” have been revised.
Cover: The title has been changed.
“Safety Instructions” has been revised.
1.1 “Introduction”
“Note” has been added.
4.4 “Cryocooler connections” Table 4-5 has been modified.
7. “Maintenance” has been revised.
ULVAC CRYOGENICS INCORPORATED R-1
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