V-TEK Royce DE35-ST - Wafer Holder Mounting

DE35-ST Operating Instructions
D292469I 17
Installing the Wafer Holder
1. Install the Wafer Holder on the Die Eject Stage (DES) with the 10-32 x 2.25
socket cap screws provided.
Figure 1.1: Max 4 in Wafer Diameter Holder
Figure 1.2: Max 6 in Wafer Diameter Holder
Figure 1.3: Max 8 in Wafer Diameter Holder