VAT 615 Series

Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1½”), DeviceNet
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
603476EA
2013-07-25
32/102
3.6.7 Pressure control configuration
Configuration of possible two pressure control algorithms.
Select the configuration what your application needs.
System Configuration
Constant gas flow available
Constant gas flow not
available
Tv*<= 500 sec
Tv* > 500 sec
Adaptive algorithm
(refer to chapter: 3.6.7.1
Adaptive algorithm)
Fixed algorithm
(refer to chapter: 3.6.7.2 Fixed algorithm)
Fixed algorithm
(refer to chapter: 3.6.7.2 Fixed algorithm)
Soft Pump
Soft Pump (refer to chapter: 3.6.7.3 Soft Pump)
Note:
Use the formula below to define the applicable pressure control algorithm.
P
SFS
CV
Tv =
q
L
q
L
gasflow for learn [mbarl/s]
p
SFS
sensor full scale pressure [mbar]
Tv* Vacuum time constant [sec]
CV Chamber Volume [l]
Upstream
Process
chamber
Control
valve
Pump
Downstream
Process
chamber
Control
valve
Pump