Inficon IC6

10 - 22
IPN 074-505-P1E
IC6 Operating Manual
Source XXX Source # 1 6 0x64 0x9C
Layer End XXX Layer #
0 = Any
0 200 0x65 0x9B
Material End
XXX
Material #
0 = Any
0 32 0x66 0x9A
Process End
XXX
Process #
0 = Any
0 50 0x67 0x99
Last Layer 0x68 0x98
Timer Minutes
(See Notes 2 &
3)
Timer # 1 20 Number of
minutes
00:0
0
99:5
9
0x69 0x97
Timer Seconds
(See Note 1)
Timer # 1 20 Time in
Tenths of
Seconds
0999.
9
0x6A 0x96
Count limit Counter # 1 20 Counter
value
0 999 0x6B 0x95
Statement Logic
Statement
#
1 100 0x6C 0x94
Xtal Fail Sensor #
0 = any
0 8 0x6D 0x93
Xtal Switching Sensor #
0 = any
0 8 0x6E 0x92
Max Power 0x6F 0x91
Min Power 0x70 0x90
Not Used 0x71 0x8F
BkupSens In
Use
0x72 0x8E
Ion Assist Dep 0x73 0x8D
Auto-Z Fail Sensor #
0 = any
0 8 0x74 0x8C
Table 10-7 Event list (continued)
Events 1st
numeric
(1 Byte)
(XXX)
Min Max 2nd
numeric
(Integer)
(YYY)
Min Max Logic
Code
Logic
Code
Negated