Inficon IC6

1 - 10
IPN 074-505-P1E
IC6 Operating Manual
Idle Ramp. . . . . . . . . . . . . . . . . . . . . 1 per Source
Idle Power . . . . . . . . . . . . . . . . . 0.00 to 99.99%
Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:s
Rate . . . . . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s
Time Limit (in Deposit) . . . . . . . . . . . 00:00 to 99:59 min:s
Rate Filter Time . . . . . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, or 10.0, 20.0, 30.0 s
Time Power Averaging Time . . . . . . 0 to 30 minutes
Ion Assist Deposit . . . . . . . . . . . . . . Yes/No
On Final Thickness . . . . . . . . . . . . . Continue, Post-Dep(osit),
NonDep(osit)Cont(rol)
New Rate while in Deposit . . . . . . . . 2 Rate Ramps per Material
New Rate 1 or 2 . . . . . . . . . . . . . 0.000 to 999.9 Å/s
Start Ramp 1 or 2 . . . . . . . . . . . . 0.000 to 999.9 kÅ
Ramp Time 1 or 2. . . . . . . . . . . . 00:00 to 99:59 min:s
RateWatcher® . . . . . . . . . . . . . . . . Sample and Hold Feature
(RateWatcher) Option. . . . . . . . . Yes/No
(RateWatcher) Time . . . . . . . . . . 00:00 to 99:59 min:s
(RateWatcher) Accuracy . . . . . . 1 to 99%
Multipoint . . . . . . . . . . . . . . . . . . . . . Yes/No (average up to 8 sensors)
Aggregate Multiply . . . . . . . . . . . . . . Yes/No
(Sensor) Failure Action . . . . . . . . . . Unused, PostD(e)p(osit), Stop, Susp(e)nd,
TimeP(o)w(er)
(Sensor) Failure Trigger . . . . . . . . . . OnFail (when this sensor fails) or Last (when
the last sensor fails)
(Sensor) Weight . . . . . . . . . . . . . . . . 1 to 400.0%
(Sensor) Tooling (Factor) . . . . . . . . . 1.0 to 999.9%
CrystalTwo Tooling . . . . . . . . . . . . . . 1.0 to 999.9%
Cal(ibration) Thickness . . . . . . . . . . 0.000 to 999.9 kÅ (for Crosstalk correction)
CrystalSix (XtalSix) and Crystal12 (Xtal12) sensor selections to specify a subset of
available crystal positions:
Xtal Position First . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)
Xtal Position Last . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)