Inficon IC6

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IPN 074-505-P1E
IC6 Operating Manual
Figure 3-21 Simplified IC6 state sequence diagram
STOP
STOP
NO
NO
NO
ON
YES
YES
YES
ON/STBY
STBY/Power
FAIL
STANDBY
RESET
YES
YES
NO
NO
NO
SAVE
CURRENT
PROCESS
DATA
TURRET DELAY TIME OUT
CRUCIBLE
IN
POSITION
?
t
MEMORY CHECKS
t
READ
CONFIGURATION
SWITCHES
t
RESTORE CURRENT
PROCESS VALUES
PRECONDITION RISE
PRECONDITION SOAK
RISE TIME
1
SOURCE
SWITCH
SAME
SOURCE
AND
CRUCIBLE
?
IDLE
POWER
ZERO
?
t
LOAD FILM
PARAMETERS
SOAK
TIME
1
SOAK
HOLD
INPUT
?
RISE
TIME
2
SOAK
TIME
2
SOAK
HOLD 2
INPUT
?
SHUTTER
DELAY
?
SHUTTER
DELAY
SHUTTER
DELAY
?
CONTROL
DELAY
YES
YES
NO
MPWR
SET LAYER
TO START
)
)
)
)
)
YES
YES
A
A
NO
NO
NO
NO
NO
YES
YES
YES
YES
NO
START
or
AutoStart
Next=Yes
READY
IDLE
INCREMENT
LAYER NUMBER
IF NOT READY
OR
STOP STATE
WAS
TIME
POWER
USED
?
IDLE
RAMP
TIME
FEED
TIME
FEED
RAMP
ON FINAL THK
DECISION
DATA
LOG
UPDATE
THICKNESSFINAL
TIME ELAPSED
XTAL FAIL
TIME
ELAPSED
FINAL THK
XTAL FAIL
?
RATE
RAMP
FINAL THICKNESS
RATE RAMP THICKNESS
XTAL FAIL
FINAL THK
THK LIMIT
XTAL FAIL
?
XTAL
SWITCH
SELECTED
?
DEPOSIT
RATEWATCHER
DEPOSIT
RETAIN
THICKNESS
AT
“STOP” VALUE
ZERO
THICKNESS
PROCESS
CONTINUE
?
GOOD
XTAL
?
SWITCH
XTAL
DESIRED
RATE
=
0.0
YES
NO
XTSW
TIME
POWER
SELECTED
?
“TO
FAILURE
ACTION
STATE”
TIME
POWER
FINAL
THICK
?
)