Inficon IC6

3 - 44
IPN 074-505-P1E
IC6 Operating Manual
For the comma delimited format, all the data fields are returned for all the sensors
and crystals. If a sensor is not used during the deposition, the data field will contain
a zero.
The following values make up the data in the datalog. The data is sent in ASCII
strings when the RS-232 port is set for data logging. The data is saved as ASCII
strings in the datalog files. The ASCII strings are made up of the labels and values
in the following list. ASCII strings are CRLF (Carriage Return Line Feed)
terminated. When the data log is requested via the remote status layer command
the values are sent in the binary format only.
 Year (Integer)
 Month (Integer)
 Day (Integer)
 Hour (Integer)
 Minute (Integer)
 Process x (x = process number or, in data log files, the name if the name is
programmed)
 Run Number X (Integer)
 Layer x (Integer)
 Material x (x is the material number or, in data log files, the name if the name is
programmed)
 Process Time seconds (Integer)
 Layer Time seconds (Integer)
 Deposit Time seconds (Integer)
 Ending Thickness kÅ (Float)
 Average Rate Å/s (Float)
 Average Rate Deviation Å/s (Float)
 Ending Power % (Float)
 Average Power % (Float)
 Where it goes next (Byte):
 0 = NonDeposit Control or NonDeposit Hold
 1 = Post Deposit
 2 = Stop
 Termination Reason (Byte) (Matches the "Cause of Stop" Remote encoding
comm, see section 15.4, STOP messages, on page 15-7: