General Information 13
iina74e 01.fm technical handbook(1408)
1.3.2 Technical Data
1.3.2.1 Physical Data
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
• in vacuum mode (ULTRA) 5×10
-12
mbar l/s (see
following CAUTION)
• in sniffer mode < 5×10
-8
mbar l/s
Maximum Helium leak rate which can be displayed 0.1 mbar l/s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off,
63% of the final value)
<1 s
Roughing capability 25 m
3
/h, 17.6 cfm
(50 Hz)
Pumping speed (Helium) at the inlet (EN 1518) 30m³/h, 21.1 cfm
60 Hz
• in vacuum mode
– GROSS mode 8 l/s
– FINE mode 20 l/s
– ULTRA mode >20 l/s
Detectable masses 2, 3 and 4
Mass spectrometer 180°
magnetic sector field
Ion source 2 filaments;
Iridium/Yttriumoxide
Inlet port DN 40 KF
Run-up time (after starting) 4min
To get down to the minimum detected leak rate range some conditions must be
fulfilled:
• UL5000 has fully warmed up
• Ambient conditions must be stable (temperature, no vibration/
accelerations.)
• The part under test has been evacuated long enough (background
is no longer decreasing)
• ZERO must be active
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