Maintenance works 99
iina74e 09.fm technical handbook(1408)
9.9 Turbomolecular pump TMH 071
The PFEIFFER turbomolecular pump requires a maintenance annually or every
4000 working hours. Please refer to the PFEIFFER operating instructions PM 800
504 BN/F and PT 0017 BN/B for more detailled informations. The maintenance work
should be performed by the INFICON service or an authorized INFICON service
partner.
9.10 Scroll Pump
Take the maintenance rates of the different scroll pump (IWATA, VARIAN) from the
maintenance plan in chapter 9.4.
The maintenance of the scroll pump should be exclusively performed by the
INFICON service or an authorized INFICON service partner.
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